Description
X-Ray Photoelectron Spectroscopy (XPS) for elemental chemical analysis of surfaces and interfaces in UHV;
Chemical bonding analysis (Li – U);
Monochromatic X-ray source (Al) - improved spectral resolution;
Local analysis and mapping (110, 55, 27, 15 µm);
Surface charge neutralization by low energy electron flux;
Ion sputtering for depth composition analysis (1-5 keV);
Data acquisition system: Vision;
Data analysis: CasaXPS.
